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Company News | 2025-03-11

Ewards vacuum pump repair E2M1.5

Fault phenomenon: Edwards E2M1.5 vacuum pump can not reach the ultimate vacuum degree, oil leakage


Failure analysis: the vacuum system may have a slight air leakage; the seals are aging, 


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Measures: Check the airtightness of the vacuum system; replace the vacuum pump sealing kit; replace the pump oil; polish and clean the internal pump chamber, and find the coupling drive block damaged, and replace it!


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